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Neochem PU - Key ingredients in the high-tech electronics industry

NF3, produced by Neochem Performance Unit, is a kind of specialty gas used in the production process of semiconductor, TFT LCD, and solar cell. This gas was commercialized by Hyosung’s own R&D activities.
It landed on the market immediately after mechanical completion in 2007 by achieving on-spec product in the shortest period.
Furthermore, Hyosung is going to expand production capacity of NF3 and to diversify product portfolio to various specialty gases & chemicals, aiming at becoming a global leading manufacturer of specialty gases for use in high-tech industry.

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NF3 (Nitrogen Trifluoride)
This is a specialty gas for cleaning CVD chamber in the production process of semiconductor, TFT LCD and solar cell. It boasts of purity level of more than 99.99%.

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