NF3, produced by Neochem Performance Unit, is a kind of specialty gas used in the production process of semiconductor, TFT LCD, and solar cell. This gas was commercialized by Hyosung’s own R&D activities.
It landed on the market immediately after mechanical completion in 2007 by achieving on-spec product in the shortest period.
Furthermore, Hyosung is going to expand production capacity of NF3 and to diversify product portfolio to various specialty gases & chemicals, aiming at becoming a global leading manufacturer of specialty gases for use in high-tech industry.
- NF3 (Nitrogen Trifluoride)
This is a specialty gas for cleaning CVD chamber in the production process of semiconductor, TFT LCD and solar cell. It boasts of purity level of more than 99.99%.
|
|
||
| Address | HQ : 119, Mapo-daero, Mapo-gu, Seoul, Korea |
|
| Yongyeon Plant I : 66, 487beon-gil, Cheoyong-ro, Nam-gu, Ulsan, Korea, Korea |
|
|
